Influence of Structural and Electrical Characteristics of Extended Defects on GaAs Field Effect Transistors
Keyword(s):
Lec Gaas
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ABSTRACTThe paper presents a systematic study of grown-in and process-induced defects on LEC GaAs substrates. Defects have been revealed by photoetching the wafers with diluted Sirti-like solutions after various processing steps. MESFET arrays have been processed on the wafers and a systematic mapping of the I-V characteristics has been performed. A correlation between various defect configurations and the FET threshold voltage shifts has been established.
2014 ◽
Vol 16
(22)
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pp. 10861-10865
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2009 ◽
Vol 48
(5)
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pp. 05DC01
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1991 ◽
Vol 24
(11)
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pp. 2032-2038
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2021 ◽
Vol 21
(8)
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pp. 4330-4335
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