Characterization Study of Al-Plug Technology
Keyword(s):
ABSTRACTThis work investigates the reliability issues associated with an aluminum sputter process, called the Al-plug process, that results in the complete filling of submicron contacts and vias of various sizes. The state-of-the-art Al-plug technology has proven its superiority over conventional processes due to its process simplicity and complete elimination of metal step-coverage problems and dielectric voiding over contacts/vias, resulting in higher reliability. Materials and electrical characterization of this metal process are presented.
1986 ◽
Vol 7
◽
pp. 85-87
◽
Keyword(s):
2007 ◽
Vol 567-568
◽
pp. 39-44
Keyword(s):
Keyword(s):
2018 ◽
Vol 3
(2)
◽
pp. 128-145
◽
2011 ◽
Vol 129
(4)
◽
pp. 2501-2501