Initial feasibility study of a dedicated synchrotron radiation light source for ultrafast X-ray science

X-ray lithography with synchrotron radiation is an important nanolithographic tool which has unique advantages in the production of high aspect ratio nanostructures. The optimum synchrotron radiation spectrum for nanometer scale X-ray lithography is normally in the range of 500 eV to 2 keV. In this paper, we present the main methods, equipment, process parameters and preliminary results of nanofabrication by proximity X-ray lithography within the nanomanufacturing program pursued by Singapore Synchrotron Light Source (SSLS). Nanostructures with feature sizes down to 200 nm and an aspect ratio up to 10 have been successfully achieved by this approach.

Download Full-text

The Lyncean Compact Light Source: x-ray synchrotron radiation for analytical and imaging applications (Conference Presentation)

Advances in Laboratory-based X-Ray Sources, Optics, and Applications VI ◽

10.1117/12.2277898 ◽

2017 ◽

Author(s):

Michael Feser

Keyword(s):

Synchrotron Radiation ◽

Light Source ◽

X Ray ◽

Compact Light Source

Download Full-text

Performance of BL07A at NewSUBARU with installation of a new multi-layered-mirror monochromator

Journal of Synchrotron Radiation ◽

10.1107/s1600577520016781 ◽

2021 ◽

Vol 28 (2) ◽

pp. 618-623

Author(s):

Shotaro Tanaka ◽

Shuto Suzuki ◽

Tomohiro Mishima ◽

Kazuhiro Kanda

Keyword(s):

Synchrotron Radiation ◽

Energy Range ◽

Light Source ◽

Monochromatic Light ◽

High Vacuum ◽

Photon Flux ◽

X Rays ◽

Monochromatic Beam ◽

X Ray ◽

High Photon Flux

Soft X-rays excite the inner shells of materials more efficiently than any other form of light. The investigation of synchrotron radiation (SR) processes using inner-shell excitation requires the beamline to supply a single-color and high-photon-flux light in the soft X-ray region. A new integrated computing multi-layered-mirror (MLM) monochromator was installed at beamline 07A (BL07A) of NewSUBARU, which has a 3 m undulator as a light source for irradiation experiments with high-photon-flux monochromatic light. The MLM monochromator has a high reflectivity index in the soft X-ray region; it eliminates unnecessary harmonic light from the undulator and lowers the temperature of the irradiated sample surfaces. The monochromator can be operated in a high vacuum, and three different mirror pairs are available for different experimental energy ranges; they can be exchanged without exposing the monochromator to the atmosphere. Measurements of the photon current of a photodiode on the sample stage indicated that the photon flux of the monochromatic beam was more than 1014 photons s−1 cm−2 in the energy range 80–400 eV and 1013 photons s−1 cm−2 in the energy range 400–800 eV. Thus, BL07A is capable of performing SR-stimulated process experiments.

Download Full-text

LIGA Technologies and Applications

MRS Bulletin ◽

10.1557/mrs2001.76 ◽

2001 ◽

Vol 26 (4) ◽

pp. 337-340 ◽

Cited By ~ 46

Author(s):

Jill Hruby

Keyword(s):

Synchrotron Radiation ◽

Methyl Methacrylate ◽

Light Source ◽

High Energy ◽

X Rays ◽

Electromechanical Systems ◽

X Ray ◽

Poly Methyl Methacrylate

LIGA, an acronym for the German words for lithography, electroplating, and molding, is a technique used to produce micro-electromechanical systems (MEMS) made from metals, ceramics, or plastics. The LIGA process utilizes x-ray synchrotron radiation as a lithographic light source. Highly collimated, high-energy x-rays from the synchrotron impinge on a patterned mask in proximity to an x-ray-sensitive photoresist, typically poly(methyl methacrylate) (PMMA).

Download Full-text

Sirepo: an open-source cloud-based software interface for X-ray source and optics simulations

Journal of Synchrotron Radiation ◽

10.1107/s1600577518010986 ◽

2018 ◽

Vol 25 (6) ◽

pp. 1877-1892 ◽

Cited By ~ 6

Author(s):

Maksim S. Rakitin ◽

Paul Moeller ◽

Robert Nagler ◽

Boaz Nash ◽

David L. Bruhwiler ◽

...

Keyword(s):

Synchrotron Radiation ◽

Open Source ◽

Light Source ◽

High Performance ◽

Application Programming Interface ◽

Computer Code ◽

Free Access ◽

Optical Elements ◽

X Ray ◽

Accurate Treatment

Sirepo, a browser-based GUI for X-ray source and optics simulations, is presented. Such calculations can be performed using SRW (Synchrotron Radiation Workshop), which is a physical optics computer code, allowing simulation of entire experimental beamlines using the concept of a `virtual beamline' with accurate treatment of synchrotron radiation generation and propagation through the X-ray optical system. SRW is interfaced with Sirepo by means of a Python application programming interface. Sirepo supports most of the optical elements currently used at beamlines, including recent developments in SRW. In particular, support is provided for the simulation of state-of-the-art X-ray beamlines, exploiting the high coherence and brightness of modern light source facilities. New scientific visualization and reporting capabilities have been recently implemented within Sirepo, as well as automatic determination of electron beam and undulator parameters. Publicly available community databases can be dynamically queried for error-free access to material characteristics. These computational tools can be used for the development and commissioning of new X-ray beamlines and for testing feasibility and optimization of experiments. The same interface can guide simulation on a local computer, a remote server or a high-performance cluster. Sirepo is available online and also within the NSLS-II firewall, with a growing number of users at other light source facilities. Our open source code is available on GitHub.

Download Full-text

A Prospect and Retrospect – the Japanese Case

Journal of Synchrotron Radiation ◽

10.1107/s0909049598003070 ◽

1998 ◽

Vol 5 (3) ◽

pp. 140-146 ◽

Cited By ~ 3

Author(s):

Taizo Sasaki

Keyword(s):

Synchrotron Radiation ◽

Light Source ◽

Research Area ◽

Third Generation ◽

Electron Synchrotron ◽

New Era ◽

X Ray ◽

History Of ◽

Technical Innovations ◽

Radiation Research

The early through recent history of synchrotron radiation research in Japan, since the initial efforts in 1962, is reviewed. Following a period of parasitic use of an electron synchrotron, Japanese users attempted to build a storage ring as a dedicated soft X-ray source, which was completed in 1974. It opened up a new era of second-generation synchrotron radiation research. The Photon Factory, a dedicated X-ray source commissioned in 1982, provided a much wider research area as well as a number of technical innovations, among which insertion devices brought the further prospect of significant improvements in the properties of sources. As a consequence, the new concept of a light source oriented towards full exploitation of insertion devices, or the idea of a third-generation source, was created. The motivations and developments which led to Spring-8, a third-generation Japanese X-ray source that is currently being commissioned, will be reviewed briefly.

Download Full-text

The advanced light source at Lawrence Berkeley Laboratory—A high-brightness soft x-ray synchrotron-radiation facility

10.1063/1.39813 ◽

1990 ◽

Author(s):

Alfred S. Schlachter ◽

Arthur L. Robinson

Keyword(s):

Synchrotron Radiation ◽

Light Source ◽

Lawrence Berkeley Laboratory ◽

High Brightness ◽

X Ray ◽

Advanced Light Source

Download Full-text

The Diamond Light Source and the challenges ahead for structural biology: some informal remarks

Philosophical Transactions of The Royal Society A Mathematical Physical and Engineering Sciences ◽

10.1098/rsta.2013.0156 ◽

2015 ◽

Vol 373 (2036) ◽

pp. 20130156 ◽

Cited By ~ 3

Author(s):

V. Ramakrishnan

Keyword(s):

Synchrotron Radiation ◽

Light Source ◽

Structural Biology ◽

Complex Structures ◽

Biological Processes ◽

Short Article ◽

X Ray ◽

X Ray Crystallography ◽

The Past

The remarkable advances in structural biology in the past three decades have led to the determination of increasingly complex structures that lie at the heart of many important biological processes. Many of these advances have been made possible by the use of X-ray crystallography using synchrotron radiation. In this short article, some of the challenges and prospects that lie ahead will be summarized.

Download Full-text