scholarly journals On-Chip Integration of Pressure Plus 2-Axis (X/Z) Acceleration Composite TPMS Sensors with a Single-Sided Bulk-Micromachining Technique

Micromachines ◽  
2019 ◽  
Vol 10 (7) ◽  
pp. 473 ◽  
Author(s):  
Jiachou Wang ◽  
Fang Song
Keyword(s):  
Low Cost ◽  
Pressure Sensors ◽  
Silicon On Insulator ◽  
Automotive Electronics ◽  
Fabrication Technique ◽  
Front Side ◽  
Tire Pressure ◽  
Automobile Tire ◽  
Chip Size ◽  
On Chip

A novel on-chip integration of pressure plus 2-axis (X/Z) acceleration composite sensors for upgraded production of automobile tire pressure monitoring system (TPMS) is proposed, developed, and characterized. Herein, the X-axis accelerometer is with the cantilever beam-mass structure and is used for automatically identifying and positioning each of the four wheels. The IC-Foundry-Compatible low-cost batch fabrication technique of MIS (i.e., Micro-openings Inter-etch and Sealing) is employed to only fabricate the device from the front side of (111) silicon wafer, without double-sided micromachining, wafer bonding, complex Cavity-SOI (Silicon on Insulator) processing, and expensive SOI-wafer needed. Benefited from the single-wafer front-side fabrication technique on ordinary single-polished wafers, the fabricated composite TPMS sensor has the advantages of a small chip-size of 1.9 mm × 1.9 mm, low cross-talk interference, low-cost, and compatible process with IC-foundries. The fabricated pressure sensors, X-axis accelerometer and Z-axis accelerometer, show linear sensing outputs, with the sensitivities as about 0.102 mV/kPa, 0.132 mV/kPa, and 0.136 mV/kPa, respectively. Fabricated with the low-cost front-side MIS process, the fabricated composite TPMS sensors are promising in automotive electronics and volume production.

Design and Calibration of MIMU Based on Chip Size Micro Inertial Sensors

2013 ◽  
Vol 849 ◽  
pp. 302-309
Author(s):  
Yun Xu ◽  
Xin Hua Zhu ◽  
Yu Wang
Keyword(s):  
High Performance ◽  
Inertial Sensors ◽  
Low Cost ◽  
Rapid Development ◽  
Experimental Result ◽  
Integrated Navigation ◽  
Bias Stability ◽  
Chip Size ◽  
Order Of Magnitude ◽  
On Chip

With rapid development of micro fabrication technology, the performance of MIMU has gradually improved. The MIMU introduced in this paper is based on the silicon micro machined gyroscope of type MSG7000D and accelerometer of type MSA6000. The volume of it is 3×3×3cm3, the mass is 68.5g and the power consumption is less than 1w. The experimental result shows that the bias stability of the gyroscope and accelerometer for each axis of the designed MIMU is less than 10°/h and 0.5mg respectively. For the non orthogonality in three axes of the structure, MIMU needs to be calibrated. After calibration, the measurement accuracy has improved by an order of magnitude. The designed MIMU can satisfy the requirement of high performance, low cost, light weight and small size for strap-down navigation system, thus it can be widely applied not only to the field of vehicles integrated navigation, attitude measurement but also to the fields of personal goods such as mobile, game consoles and so on.

50 GHz S-shaped rat-race balun with 1.4 dB insertion loss in a wafer-level chip-size package process

2009 ◽  
Vol 1 (4) ◽  
pp. 347-352
Author(s):  
Ahmet Oncu ◽  
Chiaki Inui ◽  
Yasuo Manzawa ◽  
Minoru Fujishima
Keyword(s):  
Integrated Circuits ◽  
Insertion Loss ◽  
Silicon On Insulator ◽  
Cmos Circuits ◽  
Wafer Level ◽  
Chip Area ◽  
The Core ◽  
Chip Size ◽  
Differential Circuits ◽  
On Chip

In millimeter-wave CMOS circuits, a balun is useful for connecting off-chip single-end devices and on-chip differential circuits to improve noise immunity. However, an on-chip balun occupies a large chip area. To reduce the chip area required for the on-chip balun, a new rat-race balun using a rewiring technology with a wafer-level chip-size package (W-CSP) is proposed. The W-CSP balun occupies no area in a die because it is placed over integrated circuits. In the proposed balun, an S-shaped structure is adopted in order to directly connect the balun to differential GSGSG pads on a chip with a small area. The S-shaped W-CSP balun was fabricated on a silicon-on-insulator (SOI) substrate. The core area of the S-shaped rat-race balun is 480×735 µm, which is 22.4% that of a square rat-race balun. As a result of measurement, we found that the minimum insertion loss is 1.4 dB and the operating frequency ranges from 40 to 61 GHz.

A NOVEL DESIGN OF SERPENTINE STRUCTURE FOR ENHANCED PERFORMANCE OF MEMS BASED PRESSURE SENSORS

2012 ◽  
pp. 64-67
Author(s):  
WINNE JERRY ◽  
P.ANITHA SARASWATHI
Keyword(s):  
Measurement System ◽  
Pressure Measurement ◽  
Pressure Range ◽  
Pressure Sensors ◽  
Silicon Membrane ◽  
Sensing Element ◽  
Tire Pressure ◽  
Automobile Tire ◽  
Novel Design ◽  
Pressure Measurement System

In this work an effective MEMS based capacitive pressure measurement system is proposed. Thepressure sensing element consists of two capacitorplates. Thebottom plate is mechanically fixed, whilethe upper plate is a flexible silicon membrane with flexures. The pressure acts on the upper plate. Avariable separation between the plates is introduced.Maximizing the deflection of the plate is a keyto improve the sensitivity of the sensor. In this paper various flexure designs are studied. A comparison of the flexure sensitivity is made for the automobile tire pressure range.

scholarly journals Design and Manufacturing of a Disposable, Cyclo-Olefin Copolymer, Microfluidic Device for a Biosensor †

Sensors ◽  
2019 ◽  
Vol 19 (5) ◽  
pp. 1178 ◽  
Author(s):  
Jorge Prada ◽  
Christina Cordes ◽  
Carsten Harms ◽  
Walter Lang
Keyword(s):  
Microfluidic Device ◽  
Heating Temperature ◽  
Low Cost ◽  
Reaction Chamber ◽  
Microfluidic System ◽  
Heating Process ◽  
Design And Manufacturing ◽  
On Chip ◽  
Working Parameters ◽  
Auto Fluorescence

This contribution outlines the design and manufacturing of a microfluidic device implemented as a biosensor for retrieval and detection of bacteria RNA. The device is fully made of Cyclo-Olefin Copolymer (COC), which features low auto-fluorescence, biocompatibility and manufacturability by hot-embossing. The RNA retrieval was carried on after bacteria heat-lysis by an on-chip micro-heater, whose function was characterized at different working parameters. Carbon resistive temperature sensors were tested, characterized and printed on the biochip sealing film to monitor the heating process. Off-chip and on-chip processed RNA were hybridized with capture probes on the reaction chamber surface and identification was achieved by detection of fluorescence tags. The application of the mentioned techniques and materials proved to allow the development of low-cost, disposable albeit multi-functional microfluidic system, performing heating, temperature sensing and chemical reaction processes in the same device. By proving its effectiveness, this device contributes a reference to show the integration potential of fully thermoplastic devices in biosensor systems.

scholarly journals Towards lab-on-chip ultrasensitive ethanol detection using photonic crystal waveguide operating in the mid infrared

Nanophotonics ◽  
2021 ◽  
Vol 0 (0) ◽  
Author(s):  
Ali Rostamian ◽  
Ehsan Madadi-Kandjani ◽  
Hamed Dalir ◽  
Volker J. Sorger ◽  
Ray T. Chen
Keyword(s):  
Photonic Crystal ◽  
Slow Light ◽  
High Sensitivity ◽  
Guided Wave ◽  
Silicon On Insulator ◽  
Group Index ◽  
Photonic Crystal Waveguide ◽  
Mid Infrared ◽  
Lab On Chip ◽  
On Chip

Abstract Thanks to the unique molecular fingerprints in the mid-infrared spectral region, absorption spectroscopy in this regime has attracted widespread attention in recent years. Contrary to commercially available infrared spectrometers, which are limited by being bulky and cost-intensive, laboratory-on-chip infrared spectrometers can offer sensor advancements including raw sensing performance in addition to use such as enhanced portability. Several platforms have been proposed in the past for on-chip ethanol detection. However, selective sensing with high sensitivity at room temperature has remained a challenge. Here, we experimentally demonstrate an on-chip ethyl alcohol sensor based on a holey photonic crystal waveguide on silicon on insulator-based photonics sensing platform offering an enhanced photoabsorption thus improving sensitivity. This is achieved by designing and engineering an optical slow-light mode with a high group-index of n g  = 73 and a strong localization of modal power in analyte, enabled by the photonic crystal waveguide structure. This approach includes a codesign paradigm that uniquely features an increased effective path length traversed by the guided wave through the to-be-sensed gas analyte. This PIC-based lab-on-chip sensor is exemplary, spectrally designed to operate at the center wavelength of 3.4 μm to match the peak absorbance for ethanol. However, the slow-light enhancement concept is universal offering to cover a wide design-window and spectral ranges towards sensing a plurality of gas species. Using the holey photonic crystal waveguide, we demonstrate the capability of achieving parts per billion levels of gas detection precision. High sensitivity combined with tailorable spectral range along with a compact form-factor enables a new class of portable photonic sensor platforms when combined with integrated with quantum cascade laser and detectors.

scholarly journals Cavity-BOX SOI: Advanced Silicon Substrate with Pre-Patterned BOX for Monolithic MEMS Fabrication

Micromachines ◽  
2021 ◽  
Vol 12 (4) ◽  
pp. 414
Author(s):  
Marta Maria Kluba ◽  
Jian Li ◽  
Katja Parkkinen ◽  
Marcus Louwerse ◽  
Jaap Snijder ◽  
...  
Keyword(s):  
Complex Geometry ◽  
Pressure Sensors ◽  
Silicon On Insulator ◽  
Test Case ◽  
Mems Devices ◽  
Device Layer ◽  
Mems Fabrication ◽  
Silicon Islands ◽  
Design Freedom ◽  
Deep Brain

Several Silicon on Insulator (SOI) wafer manufacturers are now offering products with customer-defined cavities etched in the handle wafer, which significantly simplifies the fabrication of MEMS devices such as pressure sensors. This paper presents a novel cavity buried oxide (BOX) SOI substrate (cavity-BOX) that contains a patterned BOX layer. The patterned BOX can form a buried microchannels network, or serve as a stop layer and a buried hard-etch mask, to accurately pattern the device layer while etching it from the backside of the wafer using the cleanroom microfabrication compatible tools and methods. The use of the cavity-BOX as a buried hard-etch mask is demonstrated by applying it for the fabrication of a deep brain stimulation (DBS) demonstrator. The demonstrator consists of a large flexible area and precisely defined 80 µm-thick silicon islands wrapped into a 1.4 mm diameter cylinder. With cavity-BOX, the process of thinning and separating the silicon islands was largely simplified and became more robust. This test case illustrates how cavity-BOX wafers can advance the fabrication of various MEMS devices, especially those with complex geometry and added functionality, by enabling more design freedom and easing the optimization of the fabrication process.

Ultrasensitive, flexible, and low-cost nanoporous piezoresistive composites for tactile pressure sensing

Nanoscale ◽  
2019 ◽  
Vol 11 (6) ◽  
pp. 2779-2786 ◽  
Author(s):  
Jing Li ◽  
Santiago Orrego ◽  
Junjie Pan ◽  
Peisheng He ◽  
Sung Hoon Kang
Keyword(s):  
Carbon Nanotube ◽  
Polymer Composites ◽  
Low Cost ◽  
Pressure Sensors ◽  
Nanoporous Carbon ◽  
Pressure Sensing ◽  
Etching Method ◽  
Piezoresistive Pressure Sensors

We report a facile sacrificial casting–etching method to synthesize nanoporous carbon nanotube/polymer composites for ultra-sensitive and low-cost piezoresistive pressure sensors.

On-Chip Fabrication of None-Dead-Volume Microtips for ESI-MS Applications

2007 ◽  
Vol 121-123 ◽  
pp. 611-614
Author(s):  
Che Hsin Lin ◽  
Jen Taie Shiea ◽  
Yen Lieng Lin
Keyword(s):  
Surface Tension ◽  
Low Cost ◽  
Microfluidic Channel ◽  
Dead Volume ◽  
Esi Ms ◽  
Rapid Fabrication ◽  
Chip Fabrication ◽  
Novel Method ◽  
On Chip ◽  
Highly Uniform

This paper proposes a novel method to on-chip fabricate a none-dead-volume microtip for ESI-MS applications. The microfluidic chip and ESI tip are fabricated in low-cost plastic based materials using a simple and rapid fabrication process. A constant-speed-pulling method is developed to fabricate the ESI tip by pulling mixed PMMA glue using a 30-μm stainless wire through the pre-formed microfluidic channel. The equilibrium of surface tension of PMMA glue will result in a sharp tip after curing. A highly uniform micro-tip can be formed directly at the outlet of the microfluidic channel with minimum dead-volume zone. Detection of caffeine, myoglobin, lysozyme and cytochrome C biosamples confirms the microchip device can be used for high resolution ESI-MS applications.

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