The Error Analysis and Compensation of Two-Dimensional Precision Positioning Platform
2012 ◽
Vol 268-270
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pp. 1380-1384
Keyword(s):
Through measuring and analyzing the location error of two-dimensional precision positioning system based on the motion control card, and according to the deficiency of the first error compensation, a strategy that enhance addition based on first error compensation was put forward. That using closed loop control to compensate and correct the location error makes the positioning accuracy improved obviously, and achieves an ideal compensation effect. Under the loading conditions, X axial positioning accuracy reached 11μm, Y axial positioning accuracy reached 10μm.
2000 ◽
Vol 66
(9)
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pp. 1461-1466
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2019 ◽
Vol 297
◽
pp. 111547
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2018 ◽
Vol 2018
◽
pp. 1-14
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Keyword(s):
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2011 ◽
Vol 467-469
◽
pp. 978-983
Keyword(s):
Keyword(s):
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