Realization of Three-Dimensionally MEMS Stacked Comb Structures for Microactuators Using Low-Temperature Multi-Wafer Bonding with Self-Alignment Techniques in CMOS-Compatible Processes

A high-aspect-ratio three-dimensionally (3D) stacked comb structure for micromirror application is demonstrated by wafer bonding technology in CMOS-compatible processes in this work. A vertically stacked comb structure is designed to circumvent any misalignment issues that could arise from multiple wafer bonding. These out-of-plane comb drives are used for the bias actuation to achieve a larger tilt angle for micromirrors. The high-aspect-ratio mechanical structure is realized by the deep reactive ion etching of silicon, and the notching effect in silicon-on-insulator (SOI) wafers is minimized. The low-temperature bonding of two patterned wafers is achieved with fusion bonding, and a high bond strength up to 2.5 J/m2 is obtained, which sustains subsequent processing steps. Furthermore, the dependency of resonant frequency on device dimensions is studied systematically, which provides useful guidelines for future design and application. A finalized device fabricated here was also tested to have a resonant frequency of 17.57 kHz and a tilt angle of 70° under an AC bias voltage of 2 V.

Improving Comb Aliasing Rejection Using Sharpening of Modified Comb

This paper presents an efficient method to improve the comb aliasing rejection in a comb decimation filter without increasing its passband droop. This problem is important since aliasing and comb passband droop may deteriorate the decimated signal. We propose here to apply sharpening of the modified comb in the second stage of a two-stage comb structure. The modified comb is obtained by decreasing the middle coefficient of the impulse response of the cascade of two combs by 1/2. The sharpening polynomial with the first order tangencies is used here. As a result, the comb folding bands, where the aliasing occur, become wider and with an increased attenuation in comparison with the original comb filter. However, this improvement in the folding bands did not result in an increased passband droop. The compensator from literature is used to further decrease passband droop. The method is illustrated with examples and compared with the original comb and the methods proposed in literature for increasing aliasing rejection.

Review on Graphene Nanoparticle Composites

In recent years, graphene has attracted atlcntion. Grapheneis a thick planar sheet of Sp2 bonded carbon atoms. Its lattice is honey comb structure. Graphene is one of the most rising material due to its various fascinatingl properties. From recent study it is proved that graphene based composites with different nanoparticle show extensive applielltion. In this review we focus on recent developement in the synthetic approach, properties and the facilities of use of graph nanoparticle comosites. The advantages of graphene-nanupartide composites are specifically observed in catalytic reactions, electrochemical sensing, detection by surface enhanced Raman spectroscopy, purification of waterusing adsurbent and other applications are discussed here.

Ternary Oxidized Carbon Nanohorns/TiO2/PVP Nanohybrid as Sensitive Layer for Chemoresistive Humidity Sensor

The relative humidity (RH) sensing response of a chemoresistive sensor using a novel ternary hybrid nanocomposite film as a sensing element is presented. The sensitive layer was obtained by employing the drop-casting technique for depositing a thin film of nanocomposite between the electrodes of an interdigitated (IDT) structure. The sensing support structure consists of an IDT dual-comb structure fabricated on a oSi-SiO2 substrate. The IDT comprises chromium, as an adhesion layer (10 nm thickness), and a gold layer (100 nm thickness). The sensing capability of a novel thin film based on a ternary hybrid made of oxidated carbon nanohorns–titanium dioxide–polyvinylpyrrolidone (CNHox/TiO2/PVP) nanocomposite was investigated by applying a direct current with known intensity between the two electrodes of the sensing structure, and measuring the resulting voltage difference, while varying the RH from 0% to 100% in a humid nitrogen atmosphere. The ternary hybrid-based thin film’s resistance increased when the sensors were exposed to relative humidity ranging from 0 to 100%. It was found that the performance of the new chemoresistive sensor is consistent with that of the capacitive commercial sensor used as a benchmark. Raman spectroscopy was used to provide information on the composition of the sensing layer and on potential interactions between constituents. Several sensing mechanisms were considered and discussed, based on the interaction of water molecules with each component of the ternary nanohybrid. The sensing results obtained lead to the conclusion that the synergic effect of the p-type semiconductor behavior of the CNHox and the PVP swelling process plays a pivotal role in the overall resistance decrease of the sensitive film.

Memory dependent anomalous diffusion in comb structure under distributed order time fractional dual-phase-lag model

This paper considers a novel distributed order time fractional dual-phase-lag model to analyze the anomalous diffusion in a comb structure, which has a widespread application in medicine and biology. The newly proposed constitution model is a generalization of the dual-phase-lag model, in which a spectrum of the time fractional derivatives with the memory characteristic governed by the weight coefficient is considered and the formulated governing equation contains both the diffusion and wave characteristics. With the L1-formula to discrete the time Caputo fractional derivatives, the finite difference method is used to discretize the model and the related numerical results are plotted graphically. By adding a source term, an exact solution is defined to verify the correctness of the numerical scheme and the convergence order of the error in spatial direction is presented. Finally, the dynamic characteristics of the particle distributions and the effects of involved parameters on the total number of particles in the [Formula: see text]-direction are analyzed in detail.

Comb-like geometric constraints leading to emergence of the time-fractional Schrödinger equation

This paper presents an overview over several examples, where the comb-like geometric constraints lead to emergence of the time-fractional Schrödinger equation. Motion of a quantum object on a comb structure is modeled by a suitable modification of the kinetic energy operator, obtained by insertion of the Dirac delta function in the Laplacian. First, we consider motion of a free particle on two- and three-dimensional comb structures, and then we extend the study to the interacting cases. A general form of a nonlocal term, which describes the interactions of the particle with the medium, is included in the Hamiltonian, and later on, the cases of constant and Dirac delta potentials are analyzed. At the end, we discuss the case of non-integer dimensions, considering separately the case of fractal dimension between one and two, and the case of fractal dimension between two and three. All these examples show that even though we are starting with the standard time-dependent Schrödinger equation on a comb, the time-fractional equation for the Green’s functions appears, due to these specific geometric constraints.

Diffusion–Advection Equations on a Comb: Resetting and Random Search

This review addresses issues of various drift–diffusion and inhomogeneous advection problems with and without resetting on comblike structures. Both a Brownian diffusion search with drift and an inhomogeneous advection search on the comb structures are analyzed. The analytical results are verified by numerical simulations in terms of coupled Langevin equations for the comb structure. The subordination approach is one of the main technical methods used here, and we demonstrated how it can be effective in the study of various random search problems with and without resetting.