In this study, the corrosion resistance of titanium nitride (TiN), nitrogen titanium carbide (TiCN) and titanium-diamond-like carbon (Ti-DLC) films deposited on 316L stainless steel (SS) were compared via differences in the surface and section-cross morphologies, open circuit potential tests, electrochemical impedance spectroscopy and potentiometric tests. The corrosion resistance of the TiCN and Ti-DLC films significantly improved because of the titanium carbide (TiC) crystals that obstruct the corrosive species penetrating the as-deposited film in the electrolyte atmosphere. TiN exhibited the lowest corrosion resistance because of its low thickness and high volume of defects. The Ti-DLC film showed the lowest corrosion current density (approximately 4.577 μA/cm2) and thickness reduction (approximately 0.12 μm) in different electrolytes, particularly those with high Cl− and H+ concentrations, proving to be the most suitable corrosion protection material for 316L SS substrates.