Micro System Technologies 90
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123
(FIVE YEARS 0)

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7
(FIVE YEARS 0)

Published By Springer Berlin Heidelberg

9783642456800, 9783642456787
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Optimization of Bipolar Magneto-Transistors

1990 ◽  
pp. 599-604
Author(s):  
H. Kaneko ◽  
H. Muro ◽  
P. J. French

Wafer Bonding and Etchback Techniques for Silicon-on-Isulator Systems

1990 ◽  
pp. 551-556
Author(s):  
C. Harendt ◽  
W. Appel ◽  
H.-G. Graf ◽  
B. Höfflinger ◽  
E. Penteker
Keyword(s):  
Wafer Bonding

Thermal Tunable Minimized Semiconductor Laser-Module

1990 ◽  
pp. 465-470
Author(s):  
E. Großmann ◽  
U. Hilbk ◽  
K. Peters
Keyword(s):  
Semiconductor Laser ◽  
Laser Module

Development of a Fine Pitch Bumping Process

1990 ◽  
pp. 435-440 ◽  
Author(s):  
G. Engelmann ◽  
O. Ehrmann ◽  
J. Simon ◽  
H. Reichl
Keyword(s):  
Fine Pitch

Laser-Induced Chemical Vapour Deposition of Thin Films in Microelectronics

1990 ◽  
pp. 348-353
Author(s):  
G. Reisse ◽  
F. Gänsicke ◽  
A. Fischer ◽  
K. Zimmer ◽  
G. Zscherpe
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour

Plane Surface Embedding Technique for Thin Film Hybrids

1990 ◽  
pp. 335-340 ◽  
Author(s):  
Heinrich G. Müller ◽  
K. Jassim ◽  
K. Buschick ◽  
H. Reichl
Keyword(s):  
Thin Film ◽  
Plane Surface ◽  
Embedding Technique

Submicrometer Photolithography by Surface Imaging - Experiments and Simulation

1990 ◽  
pp. 313-318
Author(s):  
L. Bauch ◽  
U. Jagdhold ◽  
W. Höppner ◽  
J. Bauer ◽  
R. Klabes ◽  
...  
Keyword(s):  
Surface Imaging
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