Comprehensive characterization of ZnO thin films for surface acoustic wave applications

Burak Yildirim; Onur Tigli

doi:10.1007/s10854-019-01834-8

Comprehensive characterization of ZnO thin films for surface acoustic wave applications

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-019-01834-8 ◽

2019 ◽

Vol 30 (15) ◽

pp. 14621-14630

Author(s):

Burak Yildirim ◽

Onur Tigli

Keyword(s):

Thin Films ◽

Acoustic Wave ◽

Surface Acoustic Wave ◽

Zno Thin Films ◽

Comprehensive Characterization

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Brillouin light scattering characterization of the surface acoustic wave velocity in sp2 allotropes thin films

The European Physical Journal B ◽

10.1140/epjb/e2010-00076-7 ◽

2010 ◽

Vol 75 (2) ◽

pp. 151-155 ◽

Cited By ~ 3

Author(s):

E. Salas ◽

R. J. Jiménez-Riobóo ◽

A. de Andrés ◽

C. Prieto

Keyword(s):

Thin Films ◽

Light Scattering ◽

Acoustic Wave ◽

Surface Acoustic Wave ◽

Wave Velocity ◽

Brillouin Light Scattering ◽

Acoustic Wave Velocity

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Finite Element Model of Surface Acoustic Wave Method for Mechanical Characterization of Patterned Thin Films of the Ultra-Large Scaled Integrated Interconnect

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2013.6092 ◽

2013 ◽

Vol 13 (2) ◽

pp. 1602-1606

Author(s):

Xia Xiao ◽

Xingmeng Shan ◽

Ye Tao ◽

Yuan Sun ◽

Takamaro Kikkawa

Keyword(s):

Thin Films ◽

Finite Element ◽

Acoustic Wave ◽

Finite Element Model ◽

Surface Acoustic Wave ◽

Mechanical Characterization ◽

Element Model ◽

Wave Method

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Gigahertz surface acoustic wave generation on ZnO thin films deposited by radio frequency magnetron sputtering on III-V semiconductor substrates

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.2993176 ◽

2008 ◽

Vol 26 (6) ◽

pp. 1848-1851 ◽

Cited By ~ 17

Author(s):

Qi Jie Wang ◽

Christian Pflügl ◽

William F. Andress ◽

Donhee Ham ◽

Federico Capasso ◽

...

Keyword(s):

Thin Films ◽

Acoustic Wave ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Surface Acoustic Wave ◽

Wave Generation ◽

Zno Thin Films ◽

Radio Frequency Magnetron Sputtering ◽

Acoustic Wave Generation ◽

Semiconductor Substrates

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Surface Acoustic Wave Based on ZnO Thin Films Grown by RF-MBE

Chinese Journal of Luminescence ◽

10.3788/fgxb20123303.0328 ◽

2012 ◽

Vol 33 (3) ◽

pp. 328-333

Author(s):

刘凤娟 LIU Feng-juan ◽

胡佐富 HU Zuo-fu ◽

李振军 LI Zhen-jun ◽

张希清 ZHANG Xi-qing

Keyword(s):

Thin Films ◽

Acoustic Wave ◽

Surface Acoustic Wave ◽

Zno Thin Films

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Optical and structural characterization of ZnO thin films and fabrication of bulk acoustic wave resonator (BAW) for the realization of gas sensors by stacking ZnO thin layers fabricated by e-beam evaporation and rf magnetron sputtering techniques

Sensors and Actuators A Physical ◽

10.1016/j.sna.2005.11.065 ◽

2006 ◽

Vol 127 (1) ◽

pp. 49-55 ◽

Cited By ~ 21

Author(s):

Jean Pierre Atanas ◽

Roy Al Asmar ◽

Antonio Khoury ◽

Alain Foucaran

Keyword(s):

Thin Films ◽

Acoustic Wave ◽

Gas Sensors ◽

Rf Magnetron Sputtering ◽

Thin Layers ◽

Bulk Acoustic Wave ◽

Zno Thin Films ◽

Bulk Acoustic Wave Resonator ◽

Wave Resonator

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Deposition of ZnO thin films on SiO2/Si substrate with Al2O3 buffer layer by radio frequency magnetron sputtering for high frequency surface acoustic wave devices

Thin Solid Films ◽

10.1016/j.tsf.2008.12.008 ◽

2009 ◽

Vol 517 (11) ◽

pp. 3378-3381 ◽

Cited By ~ 21

Author(s):

Wen-Ching Shih ◽

Hong-Yi Su ◽

Mu-Shiang Wu

Keyword(s):

Thin Films ◽

Acoustic Wave ◽

Magnetron Sputtering ◽

Buffer Layer ◽

Surface Acoustic Wave ◽

High Frequency ◽

Zno Thin Films ◽

Radio Frequency Magnetron Sputtering ◽

Si Substrate ◽

Acoustic Wave Devices

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Fabrication and characteristics of a surface acoustic wave UV sensor based on ZnO thin films grown on a polycrystalline 3C–SiC buffer layer

Current Applied Physics ◽

10.1016/j.cap.2011.08.013 ◽

2012 ◽

Vol 12 (2) ◽

pp. 521-524 ◽

Cited By ~ 20

Author(s):

Duy-Thach Phan ◽

Gwiy-Sang Chung

Keyword(s):

Thin Films ◽

Acoustic Wave ◽

Buffer Layer ◽

Surface Acoustic Wave ◽

Zno Thin Films ◽

Uv Sensor

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Growth of ZnO thin films on interdigital transducer/Corning 7059 glass substrates by two-step fabrication methods for surface acoustic wave applications

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/31/8/004 ◽

1998 ◽

Vol 31 (8) ◽

pp. 943-950 ◽

Cited By ~ 48

Author(s):

Mu-Shiang Wu ◽

Wen-Ching Shih ◽

Woo-Hu Tsai

Keyword(s):

Thin Films ◽

Acoustic Wave ◽

Surface Acoustic Wave ◽

Zno Thin Films ◽

Glass Substrates ◽

Interdigital Transducer

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Comprehensive characterization of surface acoustic wave resonators using relaxor based ferroelectric single crystals

Applied Physics Letters ◽

10.1063/1.4816020 ◽

2013 ◽

Vol 103 (3) ◽

pp. 032907

Author(s):

Jing Chen ◽

Tao Han ◽

Xiaojun Ji ◽

Xiangyong Zhao ◽

Haosu Luo

Keyword(s):

Acoustic Wave ◽

Single Crystals ◽

Surface Acoustic Wave ◽

Acoustic Wave Resonators ◽

Comprehensive Characterization

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Comprehensive characterization of Surface acoustic wave trapping in a periodic array of high aspect ratio electrodes

2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum ◽

10.1109/freq.2007.4319175 ◽

2007 ◽

Author(s):

J. Masson ◽

V. Laude ◽

L. Robert ◽

W. Daniau ◽

A. Khelif ◽

...

Keyword(s):

Aspect Ratio ◽

Acoustic Wave ◽

Surface Acoustic Wave ◽

High Aspect Ratio ◽

Periodic Array ◽

Wave Trapping ◽

Comprehensive Characterization

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