Micro-Raman characterization of stress distribution within free standing mono- and poly-crystalline silicon membranes
1998 ◽
Vol 41-42
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pp. 469-472
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Keyword(s):
1994 ◽
Vol 42
(1-3)
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pp. 689-694
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2011 ◽
Vol 679-680
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pp. 141-144
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Keyword(s):
Keyword(s):
2016 ◽
Vol 54
(6)
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pp. 415-422
2016 ◽
Vol 28
(35)
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pp. 356002
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