Multilayer mirrors in extreme ultraviolet lithography
2007 ◽
Vol 46
(9B)
◽
pp. 6155-6160
◽
2011 ◽
Vol 50
(6)
◽
pp. 06GB05
◽
2008 ◽
Vol 468
(15-20)
◽
pp. 1456-1460
◽
2010 ◽
Vol 87
(11)
◽
pp. 2134-2138
◽