Micro-pressure sensor dynamic performance analysis

Sensor Review ◽  
2014 ◽  
Vol 34 (4) ◽  
pp. 367-373 ◽  
Author(s):  
Bian Tian ◽  
Yulong Zhao ◽  
Zhe Niu ◽  
Jiang Zhuangde

Purpose – The purpose of this paper is to report on a piezoresistive pressure sensor for micro-pressure measurement with a cross-beam membrane (CBM) structure. This study analyzes the dynamic characteristics of the proposed device. Design/methodology/approach – This CBM sensor possesses high stiffness and sensitivity, measuring dynamic pressure more effectively in a high-frequency environment compared with other piezoresistive structures. The dynamic characteristics are derived using the finite element method to analyze the dynamic responses of the new structure, including natural frequency and lateral effect performances. The CBM dynamic performances are compared with traditional structures. Findings – The pressure sensor performance was evaluated, and the experimental results indicate that they all exhibit similar dynamic characteristics as the designed model. Compared with traditional structures such as the single island, the CBM proves to be superior in evaluating the dynamic performances of pressure sensors at high frequencies of > 30 kHz. Originality/value – Most studies of this micro pressure sensors attempt to promote the sensitivity or focus on the static performance of pressure sensor with micro gauge. This study is concerned with analyze the dynamic characterism of micro pressure sensor and compared with the traditional structures, that prove the CBM structure has stable dynamic performance and is a better option for measuring dynamic micro pressure in biomedical applications.

Pressure sensing and measurement are of utmost importance in many of the process industries and biomedical applications. The key element of the pressure sensor is diaphragm and the diaphragm design including shape and dimensions play a major role in sensitivity of pressure sensor irrespective of the type of sensor viz. capacitive, piezoresistive or piezoelectric sensor. The acoustic pressure sensors require the proper analysis of dynamic performance of the key element since the acoustic source is dynamic pressure. This paper presents the stationary and dynamic performance analysis of diaphragm for piezoelectric acoustic pressure sensor. The analysis has been done for better deflection of the diaphragm and optimized stress and strain in order to achieve maximum sensitivity. In design step, at first the diaphragm is analysed for natural frequency, modal frequencies and bandwidth of the structure since the piezoelectric resonant sensors can be used for sensing whenresonant frequency of the membrane is at least 3 to 5 times the highest applied frequency and for energy harvesting applications, when it is almost equal to the applied frequency.Hence, a comparison of shapes of diaphragm, with their fundamental and modal frequencies, deflection, and stress and strain is established. Further a resonant sensor structure is also analyzed for dynamic performance with cavity neck of different size to understand the importance of cavity neck in dynamic performance of the sensor. The circular diaphragm is found be the best choice from the point of view of maximum deflection and natural frequency and the structure with cavity neck has better bandwidth and deflection.


2011 ◽  
Vol 250-253 ◽  
pp. 3822-3826 ◽  
Author(s):  
Xian Mai Chen ◽  
Xia Xin Tao ◽  
Gao Hang Cui ◽  
Fu Tong Wang

The general track spectrum of Chinese main railway lines (ChinaRLS) and the track spectrum of American railway lines (AmericaRLS) are compared in terms of character of frequency domain, statistical property of time domain samples and dynamic performance. That the wavelength range of the ChinaRLS, which is characterized by the three levels according to the class of railway line, is less than AmericaRLS at common wave band of 1~50m is calculated. Simultaneously, the mean square values of two kinds of track spectra are provided at the detrimental wave bands of 5~10m, 10~20m, and so on. The time-histories of ChinaRLS and AmericaRLS are simulated according to the trigonometric method, and the digital statistical nature of simulated time samples is analyzed. With inputting the two kinds of time-histories into the vehicle-railway system, the comparative analysis of the two kinds of dynamic performances for ChinaRLS and AmericaRLS is done in terms of car body acceleration, rate of wheel load reduction, wheel/rail force, and the dynamic responses of track structure. The result shows that ChinaRLS can characterize the feature of the Chinese track irregularity better than AmericaRLS, the track irregularity with the ChinaRLS of 200km/h is superior to the AmericaRLS, and the track irregularity with the ChinaRLS of 160km/h corresponds to with the sixth of AmericaRLS.


Sensor Review ◽  
2015 ◽  
Vol 35 (1) ◽  
pp. 85-97 ◽  
Author(s):  
C.L. Yang ◽  
A. Mohammed ◽  
Y Mohamadou ◽  
T. I. Oh ◽  
M. Soleimani

Purpose – The aim of this paper is to introduce and to evaluate the performance of a multiple frequency complex impedance reconstruction for fabric-based EIT pressure sensor. Pressure mapping is an important and challenging area of modern sensing technology. It has many applications in areas such as artificial skins in Robotics and pressure monitoring on soft tissue in biomechanics. Fabric-based sensors are being developed in conjunction with electrical impedance tomography (EIT) for pressure mapping imaging. This is potentially a very cost-effective pressure mapping imaging solution in particular for imaging large areas. Fabric-based EIT pressure sensors aim to provide a pressure mapping image using current carrying and voltage sensing electrodes attached on the boundary of the fabric patch. Design/methodology/approach – Recently, promising results are being achieved in conductivity imaging for these sensors. However, the fabric structure presents capacitive behaviour that could also be exploited for pressure mapping imaging. Complex impedance reconstructions with multiple frequencies are implemented to observe both conductivity and permittivity changes due to the pressure applied to the fabric sensor. Findings – Experimental studies on detecting changes of complex impedance on fabric-based sensor are performed. First, electrical impedance spectroscopy on a fabric-based sensor is performed. Secondly, the complex impedance tomography is carried out on fabric and compared with traditional EIT tank phantoms. Quantitative image quality measures are used to evaluate the performance of a fabric-based sensor at various frequencies and against the tank phantom. Originality/value – The paper demonstrates for the first time the useful information on pressure mapping imaging from the permittivity component of fabric EIT. Multiple frequency EIT reconstruction reveals spectral behaviour of the fabric-based EIT, which opens up new opportunities in exploration of these sensors.


2006 ◽  
Vol 505-507 ◽  
pp. 1057-1062 ◽  
Author(s):  
Ho Chang ◽  
Mu Jung Kao ◽  
Tsing Tshih Tsung ◽  
J.L. Wu

This study developed a square-like pressure wave generator as an excitation source to test dynamic characteristics of pressure sensors. The developed generator can generate a square-like pressure wave of as high as 2 kHz and can achieve high-frequency switching by utilizing the differential principle through a series of mechanical rotations between the revolving spindle and revolving ring. The square-like pressure wave generated is input into the hydraulic system while the output voltage signals given by the pressure sensor can be analyzed by spectrum analysis to obtain dynamic characteristics of the pressure sensor


Sensor Review ◽  
2018 ◽  
Vol 38 (2) ◽  
pp. 248-258
Author(s):  
Gobi K. ◽  
Kannapiran B. ◽  
Devaraj D. ◽  
Valarmathi K.

Purpose The conventional strain gauge type pressure sensor suffers in static testing of engines due to the contact transduction method. This paper aims to focus on the concept of non-contact transduction-based pressure sensor using eddy current displacement sensing coil (ECDS) to overcome the temperature limitations of the strain gauge type pressure sensor. This paper includes the fabrication of prototypes of the proposed pressure sensor and its performance evaluation by static calibration. The fabricated pressure sensor is proposed to measure pressure in static test environment for a short period in the order of few seconds. The limitations of the fabricated pressure sensor related to temperature problems are highlighted and the suitable design changes are recommended to aid the future design. Design/methodology/approach The design of ECDS-based pressure sensor is aimed to provide non-contact transduction to overcome the limitations of the strain gauge type of pressure sensor. The ECDS is designed and fabricated with two configurations to measure deflection of the diaphragm corresponding to the applied pressure. The fabricated ECDS is calibrated using a standard micro meter to ensure transduction within limits. The fabricated prototypes of pressure sensors are calibrated using dead weight tester, and the calibration results are analyzed to select the best configuration. The proposed pressure sensor is tested at different temperatures, and the test results are analyzed to provide recommendations to overcome the shortcomings. Findings The performance of the different configurations of the pressure sensor using ECDS is evaluated using the calibration data. The analysis of the calibration results indicates that the pressure sensor using ECDS (coil-B) with the diaphragm as target is the best configuration. The accuracy of the fabricated pressure sensor with best configuration is ±2.8 per cent and the full scale (FS) output is 3.8 KHz. The designed non-contact transduction method extends the operating temperature of the pressure sensor up to 150°C with the specified accuracy for the short period. Originality/value Most studies of eddy current sensing coil focus on the displacement and position measurement but not on the pressure measurement. This paper is concerned with the design of the pressure sensor using ECDS to realize the non-contact transduction to overcome the limitations of strain gauge type pressure sensors and evaluation of the fabricated prototypes. It is shown that the accuracy of the proposed pressure sensor is not affected by the high temperature for the short period due to non-contact transduction using ECDS.


Sensor Review ◽  
2020 ◽  
Vol 40 (5) ◽  
pp. 529-534
Author(s):  
Igor S. Nadezhdin ◽  
Aleksey G. Goryunov

Purpose Differential pressure is an important technological parameter, one urgent task of which is control and measurement. To date, the lion’s share of research in this area has focused on the development and improvement of differential pressure sensors. The purpose of this paper is to develop a smart differential pressure sensor with improved operational and metrological characteristics. Design/methodology/approach The operating principle of the developed pressure sensor is based on the capacitive measurement principle. The measuring unit of the developed pressure sensor is based on a differential capacitive sensitive element. Programmable system-on-chip (PSoC) technology has been used to develop the electronics unit. Findings The use of a differential capacitive sensitive element allows the unit to compensate for the influence of interference (for example, temperature) on the measurement result. With the use of PSoC technology, it is also possible to increase the noise immunity of the developed smart differential pressure sensor and provide an unparalleled combination of flexibility and integration of analog and digital functionality. Originality/value The use of PSoC technology in the developed smart differential pressure sensor has many indisputable advantages, as the size of the entire circuit can be minimized. As a result, the circuit has improved noise immunity. Accordingly, the procedure for debugging and changing the software of the electronics unit is simplified. These features make development and manufacturing cost effective.


Sensor Review ◽  
2016 ◽  
Vol 36 (4) ◽  
pp. 405-413 ◽  
Author(s):  
Semih Dalgin ◽  
Ahmet Özgür Dogru

Purpose The purpose of this study is to investigate the effect of internal and external factors on the accuracy and consistency of the data provided by mobile-embedded micro-electromechanical system (MEMS) pressure sensors based on smartphones currently in use. Design/methodology/approach For this purpose, sensor type and smartphone model have been regarded as internal factors, whereas temperature, location and usage habits have been considered as external factors. These factors have been investigated by examining data sets provided by sensors from 14 different smartphones. In this context, internal factors have been analyzed by implementing accuracy assessment processes for three different smartphone models, whereas external factors have been evaluated by analyzing the line charts which present timely pressure changes. Findings The study outlined that the sensor data at different sources have different characteristics due to the affecting parameters. Even if the pressure sensors are used under similar circumstances, data of these sensors have inconsistencies because of the sensor drift originated by internal factors. This study concluded that it was not applicable to provide a common correction coefficient for pressure sensor data of each smartphone model. Therefore, relative data (pressure differences) should be taken into consideration rather than absolute data (pressure values) when developing mobile applications using sensor data. Research limitations/implications Results of this study can be used as the guideline for developing mobile applications using MEMS pressure sensors. One of the main finding of this paper is promoting the use of relative data (pressure differences) rather than absolute data (pressure values) when developing mobile applications using smartphone-embedded sensor data. This significant result was proved by examinations applied with in the study and can be applied by future research studies. Originality/value Existing studies mostly evaluate the use of MEMS pressure sensor data obtained from limited number of smartphone models. As each smartphone model has a specific technology, factors affecting the sensor performances should be identified and analyzed precisely in terms of smartphone models for providing extensive results. In this study, five smartphone models were used fractionally. In this context, they were used for examining the common effects of the factors, and detailed accuracy assessments were applied by using two high-tech smartphones in the market.


2005 ◽  
Vol 295-296 ◽  
pp. 533-538 ◽  
Author(s):  
Tsing Tshih Tsung ◽  
Lee Long Han ◽  
Liang Chia Chen ◽  
Ho Chang

The purpose of this paper is to analyze and compare the dynamic characteristics of various structure pressure sensors using the Improved Pressure Square Wave Generator (IPSWG). The developed IPSWG is a signal generator that creates pressure square waves as an excitation source. The dynamic characteristics of pressure sensor in hydraulic systems can be measured and evaluated effectively due to the high excitation energy. The method is also useful for dynamic testing and characterization for a high frequency range, which cannot be performed by the traditional methods, such as the hammer kit excitation, sweeping frequency pressure wave, and random frequency wave. Result shows that piezoelectric sensors (quartz) have a largest gain margin and overshoot. The strain gauge sensor has a smaller gain margin and overshoot. The piezoelectric sensor is more suitable for measuring dynamic pressure.


2014 ◽  
Vol 10 (1) ◽  
pp. 59-74
Author(s):  
Zheng Feng Bai ◽  
Yang Zhao ◽  
Jun Chen

Purpose – The existence of clearance in joints of positioning mechanism is inevitable and the movements of the real mechanism are deflected from the ideal mechanism due to the clearances. The purpose of this paper is to investigate the effects of clearance on the dynamic characteristics of dual-axis positioning mechanism of a satellite antenna. Design/methodology/approach – The dynamics analysis of dual-axis positioning mechanism with clearance are investigated using a computational approach based on virtual prototyping technology. The contact model in joint clearance is established by using a hybrid nonlinear continuous contact force model and the friction effect is considered by using a modified Coulomb friction model. Then the numerical simulation of dual-axis positioning mechanism with joint clearance is carried out and four case studies are implemented for different clearance sizes. Findings – Clearance leads to degradation of the dynamic performance of the system. The existence of clearance causes impact dynamic loads, and influences the motion accuracy and stability of the dual-axis positioning mechanism. Larger clearance induces higher frequency shakes and larger shake amplitudes, which will deteriorate positioning accuracy. Practical implications – Providing an effective and practical method to analyze dynamic characteristics of dual-axis positioning mechanism of satellite antenna with joint clearance and describing the dynamic characteristics of the dual-axis positioning system more realistically, which improves the engineering application. Originality/value – The paper is the basis of mechanism design, precision analysis and robust control system design of dual-axis positioning mechanism of satellite antenna.


2010 ◽  
Vol 163-167 ◽  
pp. 74-78
Author(s):  
Hai Yun Huang ◽  
Xiang Rong Yuan ◽  
Ka Hong Cai

The dynamic characteristics are not only the important indexes for evaluating the bridge structural rigidity, but also the principal parameters for structural dynamic analysis and earthquake resistant analysis. In this paper, a three dimensional solid finite element model for a butterfly-shape arch bridge in Zhongshan city was established to analyze the dynamic characteristics. By comparison the numerical calculation results with measured results of the dynamic loading test, an analysis and evaluation of the dynamic performance of this new type spatial arch bridge was made, and can serve as reference to the dynamic analysis and seismic design of similar bridges.


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