Calculation and Modeling of the Main Parameters of a Differential Capacitive Micromechanical Accelerometer

2020 ◽  
Author(s):  
Moon Shine Aung ◽  
B. M. Simonov ◽  
Ye Ko Ko Aung
Keyword(s):  
Micromechanical Accelerometer

Linearity enhancement of scale factor in an optical interrogated micromechanical accelerometer

2016 ◽  
Vol 55 (22) ◽  
pp. 6115 ◽  
Author(s):  
Yu Zhang ◽  
Lishuang Feng ◽  
Xiao Wang ◽  
Yang Wang
Keyword(s):  
Scale Factor ◽  
Micromechanical Accelerometer

Micromechanical accelerometer integrated with MOS detection circuitry

1982 ◽  
Vol 29 (1) ◽  
pp. 23-27 ◽  
Author(s):  
K.E. Petersen ◽  
A. Shartel ◽  
N.F. Raley
Keyword(s):  
Micromechanical Accelerometer

Parameters of Sensitive Element of Capacitive Micromechanical Accelerometer with Sandwich Construction

2019 ◽  
Vol 24 (3) ◽  
pp. 257-266 ◽  
Author(s):  
Ye Ko Ko Aung ◽  
◽  
Aung Thura ◽  
Boris M. Simonov ◽  
Sergey P. Timoshenkov ◽  
...  
Keyword(s):  
Sensitive Element ◽  
Sandwich Construction ◽  
Micromechanical Accelerometer
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