High Speed Beam Deflection and Blanking for Electron Lithography

1973 ◽  
Vol 10 (6) ◽  
pp. 987-990 ◽  
Author(s):  
L. H. Lin ◽  
H. L. Beauchamp
Keyword(s):  
High Speed ◽  
Beam Deflection ◽  
Electron Lithography

Accelerating laser processes with a smart two-dimensional polygon mirror scanner for ultra-fast beam deflection

2021 ◽  
Vol 0 (0) ◽  
Author(s):  
Florian Roessler ◽  
André Streek
Keyword(s):  
Energy Distribution ◽  
Real Time ◽  
Laser Processing ◽  
High Speed ◽  
Beam Deflection ◽  
Two Dimensional ◽  
Heat Accumulation ◽  
Field Programmable ◽  
Drill Holes ◽  
Average Laser

Abstract In laser processing, the possible throughput is directly scaling with the available average laser power. To avoid unwanted thermal damage due to high pulse energy or heat accumulation during MHz-repetition rates, energy distribution over the workpiece is required. Polygon mirror scanners enable high deflection speeds and thus, a proper energy distribution within a short processing time. The requirements of laser micro processing with up to 10 kW average laser powers and high scan speeds up to 1000 m/s result in a 30 mm aperture two-dimensional polygon mirror scanner with a patented low-distortion mirror configuration. In combination with a field programmable gate array-based real-time logic, position-true high-accuracy laser switching is enabled for 2D, 2.5D, or 3D laser processing capable to drill holes in multi-pass ablation or engraving. A special developed real-time shifter module within the high-speed logic allows, in combination with external axis, the material processing on the fly and hence, processing of workpieces much larger than the scan field.

Research of a New All-Optical Solid-State Scanner Based on GaAs

2013 ◽  
Vol 710 ◽  
pp. 269-272
Author(s):  
Guo Ya Xu ◽  
Jun Hua He ◽  
Fan Sen ◽  
Yuan Tao Zhu
Keyword(s):  
Solid State ◽  
Optical Waveguide ◽  
High Speed ◽  
Refractive Index Change ◽  
Core Layer ◽  
Beam Deflection ◽  
Optical Scanning ◽  
Signal Light ◽  
Change Effect ◽  
All Optical

Design an all-optical solid-state scanner chip, which can realize high speed light deflection in a very small space, instead of electron beam deflection scan image converter tube and opto-mechanical scanner, cancel the complicated mechanical components, use the all-optical scanning to realize the super fast phenomenon observation. The beam deflection system is based on semiconductor optical waveguide core layer carrier induced refractive index change effect to realize, its development work is mainly divided into semiconductor optical waveguide and saw prisms two parts. And through the experiment, we measured deflection angle of the scanner chip to 1053nm signal light.

Simultaneous monitoring of ablative shocks in air by high-speed cineholography and multiple-pass beam deflection probe

1996 ◽  
Vol 96-98 ◽  
pp. 154-158 ◽  
Author(s):  
J. Diaci ◽  
D. Hurley ◽  
J.W. Wagner ◽  
J. Mozˇina
Keyword(s):  
High Speed ◽  
Beam Deflection ◽  
Multiple Pass

A high-speed P-channel random access 1024-bit memory made with electron lithography

1975 ◽  
Vol 10 (2) ◽  
pp. 92-96 ◽  
Author(s):  
R.C. Henderson ◽  
R.F. Pease ◽  
A.M. Voshchenkov ◽  
R.F. Helm ◽  
R.L. Wadsack
Keyword(s):  
High Speed ◽  
Random Access ◽  
Electron Lithography

The study of high-speed electron beam deflection technology for VSB writers

2004 ◽  
Author(s):  
Junji Hirumi ◽  
Nobuyuki Yoshioka ◽  
Hiromichi Hoshi ◽  
Hiroyoshi Ando ◽  
Seiichi Tsuchiya ◽  
...  
Keyword(s):  
Electron Beam ◽  
High Speed ◽  
Beam Deflection

scholarly journals Study on high-speed beam deflection for electron beam machining.

1986 ◽  
Vol 4 (1) ◽  
pp. 84-90
Author(s):  
Taizo Iwami ◽  
Hidenobu Murakami ◽  
Seiji Yasunaga
Keyword(s):  
Electron Beam ◽  
High Speed ◽  
Beam Deflection

A high-speed p-channel random access 1024-bit memory made with electron lithography

1973 ◽  
Author(s):  
R.C. Henderson ◽  
R.F.W. Pease ◽  
A.M. Voshchenkov ◽  
P. Mallery ◽  
R.L. Wadsack
Keyword(s):  
High Speed ◽  
Random Access ◽  
Electron Lithography

Angle Selective Enhancement of Beam Deflection in High-Speed Electrooptic Switches

2007 ◽  
Vol 19 (9) ◽  
pp. 701-703 ◽  
Author(s):  
Alexei L. Glebov ◽  
Akio Sugama ◽  
Vadim I. Smirnov ◽  
Shigenori Aoki ◽  
Vasile Rotar ◽  
...  
Keyword(s):  
High Speed ◽  
Beam Deflection ◽  
Selective Enhancement
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