Defect characterization of 28 nm pitch EUV single patterning structures for iN5 node

2021 ◽  
Author(s):  
Kaushik Sah ◽  
Sayantan Das ◽  
Andrew Cross ◽  
Kay Peng ◽  
Kha Tran ◽  
...  
Keyword(s):  
Defect Characterization ◽  
28 Nm

Defect characterization of CdTe thin films using a slow positron beam

2007 ◽  
Vol 4 (10) ◽  
pp. 3659-3663 ◽  
Author(s):  
S. Neretina ◽  
D. Grebennikov ◽  
R. A. Hughes ◽  
M. Weber ◽  
K. G. Lynn ◽  
...  
Keyword(s):  
Thin Films ◽  
Positron Beam ◽  
Defect Characterization ◽  
Slow Positron ◽  
Cdte Thin Films

Subwavelength Defect Characterization Using Guided Wave Scattering Matrix

2013 ◽  
Vol 330 ◽  
pp. 504-509
Author(s):  
Yang Zheng ◽  
Jin Jie Zhou ◽  
Hui Zheng
Keyword(s):  
Wave Scattering ◽  
Scattering Matrix ◽  
Guided Wave ◽  
Defect Characterization ◽  
Challenging Problem ◽  
Recognition Method ◽  
Quantitative Characterization ◽  
S Matrix ◽  
Imaging Algorithms

Although many imaging algorithms such as ellipse and hyperbola algorithm can roughly locate defects in large plate-like structures with sparse guided wave arrays, quantitative characterization of them is still a challenging problem, especially for those small defects known as subwavelength defects. Scattering signals of defects contain abundant information so that can be used to evaluate defects. A defects recognition method using the S-matrix (scattering matrix) was presented. S-matrices of hole and crack with S0 mode incident were experimentally measured. The results show that defects can be recognized from the morphology of 2D S-matrix chart. This method has great potential to achieve more specific parameters of small defects with sparse guided wave arrays.

A multimodal method for defect characterization of large-aperture optics

2021 ◽  
Author(s):  
Jian Chen ◽  
Weiyang Yu ◽  
Haifeng Zhou ◽  
Jian Zhang ◽  
Xi Wang ◽  
...  
Keyword(s):  
Defect Characterization ◽  
Large Aperture ◽  
Multimodal Method

Defect Characterization of Sputter Deposited Au Contacts on N-TypeSi1-xGex

1997 ◽  
Vol 36 (Part 1, No. 2) ◽  
pp. 633-637
Author(s):  
Stewart A. Goodman ◽  
F. D. Auret
Keyword(s):  
Defect Characterization ◽  
Sputter Deposited

scholarly journals Comprehensive defect characterization of different iron samples after severe plastic deformation

2013 ◽  
Vol 443 ◽  
pp. 012033 ◽  
Author(s):  
Werner Puff ◽  
Xiang Zhou ◽  
Bernd Oberdorfer ◽  
Boris Scherwitzl ◽  
Peter Parz ◽  
...  
Keyword(s):  
Plastic Deformation ◽  
Severe Plastic Deformation ◽  
Defect Characterization

scholarly journals Defect characterization, diagnosis and repair of wood flooring based on a field survey

2018 ◽  
Vol 68 (329) ◽  
pp. 149 ◽  
Author(s):  
A. Delgado ◽  
C. Pereira ◽  
J. De Brito ◽  
J. D. Silvestre
Keyword(s):  
Expert System ◽  
Field Survey ◽  
Diagnostic Methods ◽  
Defect Characterization ◽  
Statistical Characterization ◽  
Affected Area ◽  
Wood Flooring ◽  
Repair Techniques

A statistical characterization of defects in 35 buildings and 98 wood floorings (softwood and hardwood floors, and laminated and engineered wood floors), their diagnostic methods and repair solutions is presented. An expert system for inspecting wood flooring, comprising the classification of defects, their most probable causes, diagnostic methods and repair techniques, was used. Results include age, affected area, severity and frequency of defects and their main causes, as well as appropriate diagnostic methods, preventive and curative repair solutions most prescribed and the most significant correlations. Scratches were detected in more than five sixths of the sample, highly associated with exterior mechanical actions, and with an inadequate finishing layer. Wearing of the finishing layer was detected in a quarter of the inspected floorings. Accordingly, the application of a suitable finishing layer and, alternatively, its replacement are the most prescribed repair techniques.

Microstructure and Defect Characterization of Nanostructured Ni3Al

2002 ◽  
pp. 93-100
Author(s):  
Steven Van Petegem ◽  
Danny Segers ◽  
Charles Dauwe ◽  
Florian dalla Torre ◽  
Helena Van Swygenhoven
Keyword(s):  
Defect Characterization
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