Defect characterization of 28 nm pitch EUV single patterning structures for iN5 node
2007 ◽
Vol 4
(10)
◽
pp. 3659-3663
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2013 ◽
Vol 330
◽
pp. 504-509
2018 ◽
Vol 88
◽
pp. 256-261
◽
Keyword(s):
1997 ◽
Vol 36
(Part 1, No. 2)
◽
pp. 633-637
Keyword(s):