Nanostructured Diamond-Like Carbon Films Grown by Off-Axis Pulsed Laser Deposition

Nanostructured diamond-like carbon (DLC) films instead of the ultrasmooth film were obtained by pulsed laser ablation of pyrolytic graphite. Deposition was performed at room temperature in vacuum with substrates placed at off-axis position. The configuration utilized high density plasma plume arriving at low effective angle for the formation of nanostructured DLC. Nanostructures with maximum size of 50 nm were deposited as compared to the ultrasmooth DLC films obtained in a conventional deposition. The Raman spectra of the films confirmed that the films were diamond-like/amorphous in nature. Although grown at an angle, ion energy of >35 eV was obtained at the off-axis position. This was proposed to be responsible for subplantation growth of sp3hybridized carbon. The condensation of energetic clusters and oblique angle deposition correspondingly gave rise to the formation of nanostructured DLC in this study.

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Mechanical Properties of Laser Processed Diamond-Like Carbon Films

MRS Proceedings ◽

10.1557/proc-397-289 ◽

1995 ◽

Vol 397 ◽

Cited By ~ 6

Author(s):

Ashok Kumar ◽

R. B. Inturi ◽

Y. Vohra ◽

U. Ekanayake ◽

N. Shu ◽

...

Keyword(s):

Mechanical Properties ◽

Room Temperature ◽

Pyrolytic Graphite ◽

High Vacuum ◽

Pulsed Laser ◽

Chemical Properties ◽

High Hardness ◽

Deposition Process ◽

Carbon Films ◽

Diamond Like Carbon

ABSTRACTDiamond-like carbon (DLC) films have a unique combination of physical and chemical properties such as high hardness, optical transparency, low coefficient of friction and chemical inertness. A pulsed laser (248 nm) has been used to ablate a pyrolytic graphite target to deposit DLC films on Si (100) and 7059 Corning glass substrates. The deposition was carried out in high vacuum (≤ 10−6 Torr) at different temperatures ranging from room temperature to 400°C. The films were characterized by x-ray diffraction, scanning electron microscope, and Raman spectroscopie techniques. The mechanical properties (hardness and Young's modulus) of these films were characterized by nanoindentation. We have found that the films deposited at room temperature and 100°C show the characteristic features of DLC films and have the better hardness and modulus properties compared to the films fabricated at higher temperatures, which transform into amorphous carbon. Correlations of pulsed laser deposition process parameters with the properties of deposited DLC films will be discussed in this paper.

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Structural and Mechanical Properties of Diamond-Like Carbon Films Prepared by Pulsed Laser Deposition With Varying Laser Intensity

MRS Proceedings ◽

10.1557/proc-593-359 ◽

1999 ◽

Vol 593 ◽

Cited By ~ 10

Author(s):

M. Bonelli ◽

A. C. Ferrari ◽

A. P. Fioravanti ◽

A. Miotello ◽

P. M. Ossi

Keyword(s):

Pulsed Laser Deposition ◽

Pyrolytic Graphite ◽

Pulsed Laser ◽

Carbon Films ◽

Laser Deposition ◽

Diamond Like Carbon ◽

Adhesion Properties ◽

Uv Raman ◽

Excellent Adhesion ◽

Scratch Tests

ABSTRACTDiamond-like carbon (DLC) films have been prepared by pulsed laser deposition (PLD) (wavelength 248 nm), ablating highly oriented pyrolytic graphite (HOPG) at room temperature in a vacuum of 10−2Pa, at fluences between 0.5 and 35 Jcm−2. Films have been deposited on Si(100) with and without a SiC interlayer. Structural analysis, such as visible and UV Raman, Infrared and Electron Energy Loss (EEL) spectroscopies show that the films are hydrogen-free and undergo a transition, from mainly disordered graphitic to up to 80% tetrahedral amorphous carbon (ta-C), above a laser threshold fluence of 5 J cm−2. The measured residual stresses of as deposited ta-C films do not exceed 2 GPa. Scratch tests show excellent adhesion properties. Low friction coefficients (0.05-0.1) have been measured in ambient humidity. Nanoindentation indicates that film hardness is as high as 70 GPa

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In situ observation of atomic hydrogen etching on diamond-like carbon films produced by pulsed laser deposition

Applied Surface Science ◽

10.1016/s0169-4332(01)00170-2 ◽

2001 ◽

Vol 174 (3-4) ◽

pp. 251-256 ◽

Cited By ~ 4

Author(s):

C.-L Cheng ◽

C.-T Chia ◽

C.-C Chiu ◽

C.-C Wu ◽

H.-F Cheng ◽

...

Keyword(s):

Pulsed Laser Deposition ◽

Atomic Hydrogen ◽

Pulsed Laser ◽

Carbon Films ◽

Laser Deposition ◽

Diamond Like Carbon ◽

In Situ Observation ◽

Hydrogen Etching

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Large Area Surface Treatment by Ion Beam Technology

MRS Proceedings ◽

10.1557/proc-438-611 ◽

1996 ◽

Vol 438 ◽

Cited By ~ 2

Author(s):

R. L. C. Wu ◽

W. Lanter

Keyword(s):

Ion Beam ◽

High Vacuum ◽

Polycrystalline Diamond ◽

Carbon Films ◽

Ultra High Vacuum ◽

Diamond Like Carbon ◽

Chemical Compositions ◽

Rf Power ◽

Large Area ◽

Ion Energy

AbstractAn ultra high vacuum ion beam system, consisting of a 20 cm diameter Rf excilted (13.56 MHz) ion gun and a four-axis substrate scanner, has been used to modify large surfaces (up to 1000 cm2) of various materials, including; infrared windows, silicon nitride, polycrystalline diamond, 304 and 316 stainless steels, 440C and M50 steels, aluminum alloys, and polycarbonates; by depositing different chemical compositions of diamond-like carbon films. The influences of ion energy, Rf power, gas composition (H2/CH4 , Ar/CH4 and O2/CH4/H2), on the diamond-like carbon characteristics has been studied. Particular attention was focused on adhesion, environmental effects, IR(3–12 μm) transmission, coefficient of friction, and wear factors under spacelike environments of diamond-like carbon films on various substrates. A quadrupole mass spectrometer was utilized to monitor the ion beam composition for quality control and process optimization.

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