scholarly journals Development of a High Precision Straight Motion System (2nd Report)

1985 ◽  
Vol 51 (4) ◽  
pp. 848-854
Author(s):  
Hisayuki AOYAMA ◽  
Akira SHIMOKOHBE
Keyword(s):  
High Precision ◽  
Motion System

scholarly journals Development of a High Precision Straight Motion System (3rd Report)

1985 ◽  
Vol 51 (12) ◽  
pp. 2277-2283 ◽  
Author(s):  
Hisayuki AOYAMA ◽  
Ichiro WATANABE ◽  
Akira SHIMOKOHBE
Keyword(s):  
High Precision ◽  
Motion System

The Fuzzy PID Control Simulation Research of the Macro-Micro Servo Driven Positioning Mechanism

2014 ◽  
Vol 668-669 ◽  
pp. 544-548
Author(s):  
You Xiong Xu ◽  
Song Qing Zhu
Keyword(s):  
High Precision ◽  
Pid Control ◽  
Control Method ◽  
Dynamic Performance ◽  
Fuzzy Pid ◽  
Fuzzy Pid Control ◽  
Simulation Research ◽  
Control Simulation ◽  
Motion System ◽  
Combined Simulation

According to the contradiction between the large stroke and high precision of positioning mechanism, in order to solve the high precision positioning problem of large stroke motion system in precision machining and precision measurement fields, the macro-micro positioning mechanism based on electrohydraulic-piezoelectric hybrid servo was presented with the advantages of the electrohydraulic servo driven and the piezoelectric precision driven. Its combined simulation model based on AMESim and MATLAB/Simulink software was built. On this basis, its fuzzy PID control simulation research was done. The simulation results showed that compared with traditional PID, the positioning mechanism static and dynamic performance could be improved by using the fuzzy control method. This will provide control theoretical basis for practical engineering applications.

A high precision straight-motion system

1986 ◽  
Vol 8 (3) ◽  
pp. 151-156 ◽  
Author(s):  
A. Shimokohbe ◽  
H. Aoyama ◽  
I. Watanabe
Keyword(s):  
High Precision ◽  
Motion System

ПЛАНАРНЫЙ СТОЛ С ПОЗИЦИОННЫМ РАЗРЕШЕНИЕМ 5 НМ ДЛЯ МИКРОЭЛЕКТРОННЫХ ТЕХНОЛОГИЙ

2020 ◽  
Vol 96 (3s) ◽  
pp. 501-514
Author(s):  
М.Г. Тяпкин ◽  
О.А. Толстых ◽  
А.П. Балковой ◽  
Г.М. Тяпкин
Keyword(s):  
Research And Development ◽  
High Precision ◽  
Structural Design ◽  
Control Structure ◽  
Parameters Identification ◽  
System Parameters ◽  
Linear Motors ◽  
Motion System ◽  
Parallel Kinematic

В статье представлены результаты разработки высокоточной многокоординатной системы движения на базе планарного стола с синхронными линейными двигателями. Раскрываются подходы к проектированию стола с использованием принципов параллельной кинематики, система управления и методы идентификации параметров и характеристик стола. Прототип системы движения обеспечивает разрешение позиционирования на уровне 5 нм. The paper presents the results of the research and development of the high precision multi-axis motion system based on the planar stage driven by the synchronous linear motors. It considers the approaches to the planar stage structural design using the principles of the parallel kinematic, the stage control structure and the system parameters identification. The achieved stage positioning resolution is 5 nm.

Control of Micro Press Using Magnetic Actuating Platform

2006 ◽  
Vol 505-507 ◽  
pp. 1189-1194
Author(s):  
Chieh Li Chen ◽  
Kevin S. Li
Keyword(s):  
High Precision ◽  
Degrees Of Freedom ◽  
Friction And Wear ◽  
Experimental Studies ◽  
Pi Controller ◽  
Plane Motion ◽  
Structure Design ◽  
Motion System ◽  
Driven System ◽  
Three Degrees Of Freedom

In this paper, a new design of three degrees-of-freedom (DOF) plane motion system actuated by electromagnetic forces is proposed and experimentally studied. The advantages of electromagnetic driven system lie in the elimination of the backlash, friction and wear phenomena. With this new structure design the coupling between the z translation, pitching and rolling motions becomes simpler than the conventional designs. A PI controller is applied and achieves the required high precision performance of the system. The experimental studies support the effectiveness of the system.

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