Microraman Characterization Of Microdefects In Bulk Sic
Keyword(s):
AbstractMicroRaman spectroscopy is used for characterizing defects in large SiC crystals with micrometer spatial resolution. The ability to identify microscopic inclusions of polytypes different than the crystal matrix is demonstrated; silicon and carbon inclusions and disorder effects are found in micropipes. A study of the Longitudinal Optic Phonon Plasmon Coupled (LOPC) Raman modes allowed to obtain local fluctuations of the net donor concentration, ND-NA, and the electron mobility around defects, which allowed impurity gettering effects to be observed.
1996 ◽
Vol 53
(15)
◽
pp. 10310-10316
◽
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
1998 ◽
Vol 106
(8)
◽
pp. 491-494
◽
1967 ◽
Vol 18
(5)
◽
pp. 159-162
◽
Keyword(s):
Keyword(s):